Program Chair:
Han-Bo-Ram (Boram) Lee
(Incheon National University, South Korea)
Program Co-Chair:
Bong Jin Kuh
(Samsung Electronics, South Korea)
Program Co-Chair:
Kivin Im
(SK hynix, South Korea)
ALE Program Chairs:
Program Chair:
Heeyeop Chae
(Sungkyunkwan University, South Korea)
Program Co-Chair:
Keun Hee Bai
(Samsung Electronics)
ALD Program Committee:
- Sumit Agarwal (Colorado School of Mines, USA)
- Ji Hwan Ahn (POSTECH, South Korea)
- Parag Banerjee (University of Central Florida, USA)
- Sean Barry (Carleton University, Canada)
- Stacey Bent (Stanford University, USA)
- Ageeth Bol (University of Michigan, USA)
- Hao Van Bui (Phenikaa University, Vietnam)
- Haripin Chandra (Merck KGaA, Darmstadt, Germany)
- Rong Chen (Huazhong University of Science and Technology, China)
- Rick Chen (Merck KGaA, Darmstadt, Germany)
- Hanmei Choi (Samsung Electronics, South Korea)
- Robert Clark (TEL, USA)
- Scott B. Clendenning (Intel, USA)
- John F. Conley, Jr. (Oregon State University, USA)
- Arrelaine Dameron (Forge Nano, USA)
- Neil P. Dasgupta (University of Michigan, USA)
- Jolien Dendooven (Ghent University, Belgium)
- Christophe Detavernier (Ghent University, Belgium)
- Benjamin Greenberg (Naval Research Lab, USA)
- Dennis Hausmann (Lam Research, USA)
- Andrea lliberi (ASM, Belgium)
- Kivin Im (SK hynix, South Korea)
- Junsoo Kim (SK hynix, South Korea)
- Jiyoung Kim (University of Texas at Dallas, USA)
- Mato Knez (CIC nanoGUNE, Spain)
- Bong Jin Juh (Samsung Electronics, South Korea)
- Han-Bo-Ram Lee (Incheon National University, South Korea)
- Wei-Min Li (Jiangsu Leadmicro Nano-Equipment Technology Ltd., China)
- Hanjin Lim (Samsung Electronics, South Korea)
- Pinyen Lin (TSMC, Taiwan)
- Adrie Mackus (Eindhoven University of Technology, The Netherlands)
- Chang-Yong Nam (Brookhaven National Lab, USA)
- Michael Nolan (Tyndall University, Ireland)
- Il-Kwon Oh (Ajou University, South Korea)
- Venkat Pallem (Air Liquide, USA)
- Jin-Seong Park (Hanyang University, South Korea)
- Henrik Pedersen (Linköping University, Sweden)
- Mikko Ritala (University of Helsinki, Finland)
- Seung Wook Ryu (SK hynix, South Korea)
- Atsushi Sakurai (Adeka Corporation, Japan)
- Tania Sandoval (Universidad Técnica Federico Santa María, Chile)
- Nathanaelle Schneider (CNRS Photovoltaics, France)
- Tamar Segal-Peretz (Israel Institute of Technology, Israel)
- Sami Sneck (Beneq, Finland)
- Jonas Sundqvist (AlixLabs, Sweden)
- Christophe Vallee (SUNY POLY, France)
- Ruud Van Ommen (Delft University of Science & Technology, The Netherlands)
- Virginia Wheeler (U.S. Naval Research Lab, USA)
- Paul Williams (Pegasus Chemicals, UK)
- Keith Wong (Applied Materials, USA)
- Charles H. Winter (Wayne State University, USA)
- Seung-Yeol Yang (SAIT, South Korea)
- Angel Yanguas-Gil (Argonne National Lab, USA)
- Junjie Zhao (Zhejiang University, China)
ALD International Advisory Committee:
- Annelies Delabie (IMEC, Belgium)
- Anjana Devi (IFW and TU Dresden, Germany)
- Jeffrey Elam (Argonne National Lab, USA)
- Steven George (University of Colorado at Boulder, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Viljami Pore (ASM, Finland)
ALD Steering Committee:
- Steven George (University of Colorado at Boulder, USA)
- Erwin Kessels (University of Eindhoven, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Gregory N. Parsons (North Carolina State University, USA
ALE Program Committee:
- Keun Hee Bai (Samsung, South Korea)
- Stacey Bent (Stanford Univ., USA)
- Andrew Cavanagh (University of Colorado at Boulder, USA)
- Heeyeop Chae (Sungkyunkwan University, South Korea)
- Jane Chang (University of California, Los Angeles)
- Sung-Il Cho (Samsung, South Korea)
- Jean-Francois de Marneffe (IMEC, Belgium)
- Rémi Dussart (GREMI, Polytech Orleans, France)
- Jeff Elam (Argonne National Laboratory, USA)
- Elina Färm (ASM Microchemistry Oy, Finland)
- Andreas Fischer (Mattson Technology, USA)
- Steve George (University of Colorado at Boulder, USA)
- Satoshi Hamaguchi (Osaka University, Japan)
- Masanobu Honda (TEL, Japan)
- Craig Huffman (Oxford Instruments, UK)
- Yohei Ishii (Hitachi High Technologies USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Harm Knoops (Oxford Instruments, UK)
- Thorsten Lill (Clarycon Nanotechnology Research, USA)
- Eric Liu (TEL, USA)
- Anil Mane (Applied Materials, USA)
- Gottlieb Oehrlein (University of Maryland, USA)
- Tero Pilvi (Applied Materials, Finland)
- Nicolas Possémé (CEA-Leti, France)
- Tatayana Rakhimova (Lomonosov Moscow State University Skobeltsyn Institute, Russia)
- Fred Roozeboom (University of Twente, The Netherlands)
- Huichan Seo (SK hynix, South Korea)
- Dmitry Suyatin (AlixLabs and Lund University, Sweden)
- Tristan Tronic (Intel, USA)
- Geun Young Yeom (Sungkyunkwan University, South Korea)
ALE Steering Committee:
- Craig Huffman (Micron, USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Steve George (University of Colorado at Boulder, USA)