Program Chair:
Han-Bo-Ram (Boram) Lee
(Incheon National University, South Korea)
Program Co-Chair:
Bong Jin Kuh
(Samsung Electronics, South Korea)
Program Co-Chair:
Kivin Im
(SK Hynix, South Korea)
ALE Program Chairs:
Program Chair:
Heeyeop Chae
(Sungkyunkwan University, South Korea)
Program Co-Chair:
Keun-Hee Bai
(Samsung Electronics)
ALD Program Committee:
- Sumit Agarwal (Colorado School of Mines, USA)
- Ji Hwan Ahn (POSTECH, South Korea)
- Parag Banerjee (University of Central Florida, USA)
- Sean Barry (Carleton University, Canada)
- Stacey Bent (Stanford University, USA)
- Ageeth Bol (University of Michigan, USA)
- Hao Van Bui (Phenikaa University, Vietnam)
- Haripin Chandra (EMD Performance Materials, USA)
- Rong Chen (Huazhong University of Science and Technology, China)
- Rick Chen (Merck, Germany)
- Hanmei Choi (Samsung Electronics, South Korea)
- Robert Clark (TEL, USA)
- Scott B. Clendenning (Intel, USA)
- John F. Conley, Jr. (Oregon State University, USA)
- Arrelaine Dameron (Forge Nano, USA)
- Neil P. Dasgupta (University of Michigan, USA)
- Jolien Dendooven (Ghent University, Belgium)
- Christophe Detavernier (Ghent University, Belgium)
- Benjamin Greenberg (Naval Research Lab, USA)
- Dennis Hausmann (Lam Research, USA)
- Andrea lliberi (ASM, Belgium)
- Kivin Im (SK Hynix, South Korea)
- Junsoo Kim (SK Hynix, South Korea)
- Jiyoung Kim (University of Texas at Dallas, USA)
- Mato Knez (CIC nanoGUNE, Spain)
- Bong Jin Juh (Samsung Electronics, South Korea)
- Han-Bo-Ram Lee (Incheon National University, South Korea)
- Hanjin Lim (Samsung Electronics, South Korea)
- Pinyen Lin (TSMC, Taiwan)
- Adrie Mackus (Eindhoven University of Technology, The Netherlands)
- Chang-Yong Nam (Brookhaven National Lab, USA)
- Michael Nolan (Tyndall University, Ireland)
- Il-Kwon Oh (Ajou University, South Korea)
- Jin-Seong Park (Hanyang University, South Korea)
- Henrik Pedersen (Linköping University, Sweden)
- Mikko Ritala (University of Helsinki, Finland)
- Seung Wook Ryu (SK Hynix, South Korea)
- Atsushi Sakurai (Adeka Corporation, Japan)
- Tania Sandoval (Universidad Técnica Federico Santa María, Chile)
- Nathanaelle Schneider (CNRS Photovoltaics, France)
- Sami Sneck (Beneq, Finland)
- Jonas Sundqvist (AlixLabs, Sweden)
- Segal-Peretz Tamar (Israel Institute of Technology, Israel)
- Christophe Vallee (SUNY POLY, France)
- Ruud Van Ommen (Delft University of Science & Technology, The Netherlands)
- Paul Williams (Pegasus Chemicals, UK)
- Charles H. Winter (Wayne State University, USA)
- Seung-Yeol Yang (SAIT, South Korea)
- Angel Yanguas-Gil (Argonne National Lab, USA)
- Junjie Zhao (Zhejiang University, China)
ALD International Advisory Committee:
- Annelies Delabie (IMEC, Belgium)
- Anjana Devi (Ruhr-University Bochum, Germany)
- Jeffrey Elam (Argonne National Lab, USA)
- Steven George (University of Colorado at Boulder, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Viljami Pore (ASM, Finland)
ALD Steering Committee:
- Steven George (University of Colorado at Boulder, USA)
- Erwin Kessels (University of Eindhoven, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Gregory N. Parsons (North Carolina State University, USA
ALE Program Committee:
- TBD
ALE Steering Committee:
- Craig Huffman (Micron, USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Steve George (University of Colorado at Boulder, USA)